Epitaxy for Si On Insulator

IR provides outsourced Si and SiGe epitaxial services for silicon on insulator structures. Low voltage CMOS integrated circuits, radiation hardened semiconductors and MEMS devices commonly use a Si layer on an insulating substrate in order to provide latch-up immunity and minimal leakage currents between adjacent devices. IR offers epitaxial services for Si and SiGe on sapphire (SOS), SIMOX, bonded wafers (e.g. UnibondTM, NanocleaveTM, BESOI) as well as the epitaxial processes necessary for the formation of the etch-stop layers and active device host layers in the bonded wafer technologies. IR offers the unique opportunity to counter-dope P++ epi layers with Ge in order to reduce stress in the film and improve wafer flatness in BESOI wafers used in MEMS applications.

IR Epitaxial Services operates 24 hours per day and 7 days per week in order to meet the needs of our customers for short turn-around time. Our customer base is worldwide and includes some of the largest names in semiconductor manufacturing as well as research institutes and universities.

IR Epitaxial Services is QS-9000, ISO 9001:2000 and ISO 14001 certified. Certification to the ISO/TS 16949 standard is scheduled to occur during Q3-CY2005.